Polymer science in nanoimprint lithography

Journal of Photopolymer Science and Technology

Volumn 18, Issue 4, 2005, Pages 551-553

  Hirai, Yoshihiko ^a  

^a Osaka Prefecture University   (Japan)

Author keywords

Defects; Modulus; Molecular weight; Nanoimprint; Optical interference; Phase shift; Retardation time; Viscosity

Indexed keywords

EID: 22144469821     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.18.551     Document Type: Review

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