Prewarping techniques in imaging: Applications in nanotechnology and biotechnology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5674, Issue , 2005, Pages 114-127

  Poonawala, Amyn ^a   Milanfar, Peyman ^a  

^a University of California Santa Cruz   (United States)

Author keywords

E beam lithography; Image synthesis; Inverse problems; Mask design; OPC; Optical micro lithography; Regularization; Retinal prosthesis; Sigmoid

Indexed keywords

BIOTECHNOLOGY; IMAGE ANALYSIS; IMAGE RECONSTRUCTION; INVERSE PROBLEMS; LITHOGRAPHY; NANOTECHNOLOGY; OPTIMIZATION; PROSTHETICS;

E-BEAM LITHOGRAPHY; IMAGE SYNTHESIS; MASK DESIGN; OPC; OPTICAL MICRO-LITHOGRAPHY; REGULARIZATION; RETINAL PROSTHESIS; SIGMOID;

IMAGING TECHNIQUES;

EID: 21944435130     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.597694     Document Type: Conference Paper

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