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Volumn 40, Issue 9, 2003, Pages 34-39
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A Little Light Magic
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Author keywords
[No Author keywords available]
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Indexed keywords
DIFFRACTION;
PHASE SHIFT;
PHOTORESISTS;
REFRACTIVE INDEX;
OPTICAL PROXIMITY CORRECTION;
INTEGRATED CIRCUIT MANUFACTURE;
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EID: 0141522968
PISSN: 00189235
EISSN: None
Source Type: Journal
DOI: 10.1109/MSPEC.2003.1228007 Document Type: Review |
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Times cited : (33)
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References (0)
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