Three-dimensional structuring of silicon for photonic crystals with complete photonic bandgaps

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5733, Issue , 2005, Pages 1-11

  Matthias, Sven ^a   Müller, Frank ^a   Gösele, Ulrich ^a  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

Electrochemical etching; Line defect; Linear defect; Macroporous silicon; Photonic bandgap; Photonic bandgap material; Photonic crystal; Planar defect; Point defect; Simple cubic; Three dimensional

Indexed keywords

ELECTROMAGNETIC WAVE PROPAGATION; ETCHING; LIGHT; OPTICAL MATERIALS; PHOTONS; POINT DEFECTS; POROUS SILICON; SILICON; THREE DIMENSIONAL;

ELECTROCHEMICAL ETCHING; LINE-DEFECT; LINEAR DEFECT; MACROPOROUS SILICON; PHOTONIC BANDGAP; PHOTONIC BANDGAP MATERIAL; PHOTONIC CRYSTAL; PLANAR DEFECT; SIMPLE CUBIC;

CRYSTALS;

EID: 21844454992     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.590551     Document Type: Conference Paper

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