Fast micromachining using picosecond lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5706, Issue , 2005, Pages 87-98

  Nebel, Achim ^a   Hermann, Thomas ^a   Henrich, Bernhard ^a   Knappe, Ralf ^a  

^a Lumera Laser GmbH   (Germany)

Author keywords

High precision; High speed; Micromachining; Picosecond lasers

Indexed keywords

ELECTRON BEAMS; ENERGY TRANSFER; INDUSTRIAL APPLICATIONS; LASER ABLATION; MICROMACHINING; PHONONS; Q SWITCHED LASERS; SOLID STATE LASERS; THERMAL EFFECTS; ULTRASHORT PULSES;

HIGH PRECISION; HIGH SPEED; PICOSECOND LASERS; PULSE DURATION;

LASER APPLICATIONS;

EID: 21844436785     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.601651     Document Type: Conference Paper

References (7)

1. Friedrich Dausinger, Helmut Hügel, Vitali Konov: "Micro-machining with ultra short laser pulses: From basic understanding to technical applications", in proceedings of Conference ALT' 02, 15-20 September 2002, Adelboden (Switzerland)
2. D. Breitling, A. Ruf, F. Dausinger, "Fundamental aspects in machining of metals with short and ultra short laser pulses", Proc. of SPIE Vol. 5339,
3. F. Dausinger, F. Lichtner, H. Lubatschowski (Eds.): Femtosecond Technology for technical and Medical Applications, Topics Appl. Phys. 96, 1-6 (2004), Springer- Berlin Heidelberg 2004
4. Andreas Ostendorfl, Frank Siegel: "Micro-machining using high energy picosecond laser pulses: A cause-effect consideration", (ICALEO 2004).
5. Ostendorf A., Kulik C., Bauer T., Barsch N.: "Ablation of metals and semiconductors with ultra short-pulsed lasers, improving surface qualities of micro cuts and grooves", in proceedings of SPIE Vol. 5340, 153-163, 2004
6. Tönshoff H. K., Ostendorf A., Körber K., Barsch N.: "Ablation and cutting of planar silicon devices using femtosecond laser pulses", in Applied Physics A 77, 237-242, 2003
7. Tönshoff H. K., Ostendorf A., Kulik C., Siegel F.: "Finishing of Cutting Tools Using Selective Material Ablation", hi: Proceedings of 1st International CIRP Seminar on Micro and Nano Technology, Copenhagen, Denmark, November 13-14, 2003