Broadband MEMS shunt switches using PZT/HfO2 multi-layered high k dielectrics for high switching isolation

Sensors and Actuators, A: Physical

Volumn 121, Issue 1, 2005, Pages 275-281

  Tsaur, Jiunnjye ^a   Onodera, Kazumasa ^b   Kobayashi, Takeshi ^a   Wang, Zhang Jie ^c   Heisig, Sven ^a   Maeda, Ryutaro ^a   Suga, Tadatomo ^d  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Netspace Inc   (Japan)

^c TOHOKU UNIVERSITY   (Japan)

^d UNIVERSITY OF TOKYO   (Japan)

Author keywords

Capacitive switch; Hafnium oxide; High dielectric constant; PZT; RF MEMS

Indexed keywords

ACCELERATION CONTROL; BROADBAND AMPLIFIERS; DIELECTRIC DEVICES; ELECTRIC DISTORTION; ELECTRIC FIELDS; GOLD COMPOUNDS; HAFNIUM COMPOUNDS; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; MOBILE TELECOMMUNICATION SYSTEMS; TENSILE STRESS; THERMODYNAMIC STABILITY;

BIAS-STRESSING TEST; CAPACITIVE SWITCHES; HAFNIUM DIOXIDE; HIGH DIELECTRIC CONSTANTS; RF-MEMS;

SWITCHES;

EID: 21744439705     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.01.026     Document Type: Article

References (8)

1. J. Ehmke, J. Brank, A. Malczewski, D. Denniston, and C. Goldsmith Lifetime characterization of capacitive RF MEMS switches IEEE MTT-S Digest 2001 227 230
2. R. Chan, R. Lesnick, D. Becher, and M. Feng Low actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles J. Micro Electromech. Syst. 12 5 2003 713 719
3. J.B. Muldavin, and G.M. Rebeiz Inline capacitive and DC-contact MEMS shunt switches IEEE Microw. Wireless Comp. Lett. 11 2001 334 346
4. G.M. Rebeiz, N.S. Barker, J.B. Muldavin, and G.L. Tan RF MEMS Theory, Design and Technology 2003 Wiley pp. 92 (Chapter 4)
5. I. Schiele, J. Huber, B. Hillerich, and F. Kozlowski Surface micromachined electrostatic microrelay J. Sens. Actuators A66 1998 345 354
6. G.M. Rebeiz, N.S. Barker, J.B. Muldavin, and G.L. Tan RF MEMS Theory, Design and Technology 2003 Wiley pp. 27 (Chapter 2)
7. J.J. Tsaur, Z.J. Wang, L. Zhang, M. Ichiki, J.W. Wan, and R. Maeda Preparation and application of lead zirconate titanate films deposited by hybrid process: sol-gel method and laser ablation Jpn. J. Appl. Phys. 41 2002 6664 6668
8. G.M. Rebeiz, N.S. Barker, J.B. Muldavin, and G.L. Tan RF MEMS Theory, Design and Technology 2003 Wiley pp. 16 (Chapter 1)