Decomposition and polymerization of perfluorinated compounds in microwave-excited atmospheric pressure plasma

Journal of Applied Physics

Volumn 97, Issue 12, 2005, Pages

  Nagai, M ^a   Hori, M ^a   Goto, T ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE PLASMA; DECOMPOSITION EFFICIENCY; FLUOROCARBON FILMS; PERFLUORINATED COMPOUNDS;

ATMOSPHERIC PRESSURE; CARBON DIOXIDE; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; FLUORINE CONTAINING POLYMERS; MICROWAVE DEVICES; POLYMERIZATION; SEMICONDUCTOR DEVICE MANUFACTURE; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASMA APPLICATIONS;

EID: 21644467302     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1931034     Document Type: Article

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