Feasibility study of a MEMS Viscous Rotary Engine Power System (VREPS)

American Society of Mechanical Engineers, Fluids Engineering Division (Publication) FED

Volumn 260, Issue , 2004, Pages 301-308

  Cauley III, Thomas H ^a   Rosario Rosario, Jose D ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Lubrication theory; MEMS; Micro power; Microfluidic; Supercritical combustion; Viscous pump

Indexed keywords

LUBRICATION THEORY; MEMS; MICRO POWER; MICROFLUIDICS; SUPERCRITICAL COMBUSTION; VISCOUS PUMPS; VISCOUS ROTARY ENGINE POWER SYSTEMS (VREPS);

COMBUSTION; ELECTRIC GENERATORS; GAS TURBINES; HEAT LOSSES; LUBRICATION; MAGNETIC CIRCUITS; MAGNETIC FIELDS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; ROTARY ENGINES; SILICON; VISCOSITY;

ELECTRIC POWER SYSTEMS;

EID: 21444459874     PISSN: 08888116     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-59916     Document Type: Conference Paper

References (13)

1. th Annual Meeting, Seattle, WA. Submitted for publication.
2. K. Fu et al. "Micro-Scale Combustion Research for Applications to MEMS Rotary IC Engine". ASME National Heat Transfer Conference, 2001.
3. th AIAA Fluid Dynamics Conf., 1997.
4. M.J. Madou. Fundamentals of Micro-Fabrication. CRC Press: 2003.
5. N. Tesla. "Tesla Turbine." Patent 1,061,206. 6 May 1913.
6. D. G. Jones and A. P. Pisano. "Fabrication of ultra thick ferromagnetic structures in silicon". ASME IMECE 2004, Anaheim, CA. November 14-19, 2004. Submitted for publication.
7. M. Gad-el-Hak. The MEMS Handbook. CRC Press: 2002.
8. YA Cengel and MA Boles. Thermodynamics: An Engineering Approach. McGraw Hill, New York: 2002.
9. J Hruby. "LIGA Technologies & Applications." MRS Bulletin, 2001.
10. th International Conference on Solid State Sensors, Actuators, and Microsystems, Boston, June 8-12, 2003.
11. M Mehregany, CA Zorman, N Rajan, and CH Wu. "Silicon Carbide MEMS for Harsh Environments." IEEE: Vol. 86, No. 8, August 1998.
12. M B J Wijesundara, et al. "Low Temperature CVD SiC Coated Si Microcomponents for Reduced Scale Engines." ASME IMECE 2003.
13. KR Williams. "Etch Rates for Micromachining Processing." IEEE JMEMS: Vol 5, No 4, December 1996.