SCOPUS 정보 검색 플랫폼

Volumn 97, Issue 8, 2005, Pages

Investigation of electrical transport properties of as-implanted silicon for making micromachined uncooled bolometric arrays

(2) Dutt, M B a Mittal, Vandna a

a SOLID STATE PHYSICS LABORATORY (India)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SEMICONDUCTORS; BOLOMETRIC ARRAYS; ELECTRIC TRANSPORT PROPERTIES; TEMPERATURE SENSORS;

BOLOMETERS; BORON; ELECTRIC CONDUCTIVITY; ELECTRIC PROPERTIES; HEAT RADIATION; ION IMPLANTATION; MICROMACHINING; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SENSORS;

TRANSPORT PROPERTIES;

EID: 21444445051 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1870123 Document Type: Article

Times cited : (6)

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