Optical measurement platform for micro-structures characterization

Guangxue Xuebao/Acta Optica Sinica

Volumn 25, Issue 6, 2005, Pages 803-808

  Hu, Xiaodong ^a   Li, Dachao ^a   Guo, Tong ^a   Jin, Cuiyun ^a   Hu, Chunguang ^a   Hu, Xiaotang ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

Computer micro vision; Laser Doppler vibrometer; Micro structure dynamic characteristics; Mirau microscopic interferometry; Optical measurement; Stroboscopic photography

Indexed keywords

COMPUTER VISION; INTERFEROMETRY; MECHANICAL PROPERTIES; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PHOTOGRAPHY; VIBRATION MEASUREMENT;

COMPUTER MICROVISION; LASER DOPPLER VIBRATOR; MIRAU MICROSCOPIC INTERFEROMETRY; OPTICAL MEASUREMENT PLATFORM; STROBOSCOPIC PHOTOGRAPHY;

OPTICAL DEVICES;

EID: 21444433660     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

1. Allyson Hartzell, David Woodilla. MEMS reliability, characterization, and test[C]. Proc. SPIE, 2001, 4558: 1-5
2. James S. Burdess, Alun J. Harris, David Wood et al.. A system for the dynamic characterization of microstructures[J]. J. Microelectromechan. System, 1997, 6(4): 322-328
3. C. Quentin Davis, Dennis M. Freeman. Using a light microscope to measure motions with nanometer accuracy[J]. Opt. Engng., 1998, 37(4): 1299-1304
4. W. Hemmert, M. S. Mermelstein, D. M. Freeman. Nanometer resolution of three-dimensional motions using video interference microscopy[C]. Proc. 12th IEEE International Conference on Micro Electro Mechanical Systems, Orlando FL, USA, 1999. 302-308
5. S. Petitgrand, R. Yahiaoui, K. Danaie et al.. 3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope[J]. Opt. Lasers Engng., 2001, 36(2): 77-101
6. Christian Rembe, Lilac Muller, Richard S. Muller et al.. Full three-dimensional motion characterization of a gimballed electrostatic microactuator[C]. Proc. IEEE International Reliability Physics Symposium, Orlando FL, USA, 2001. 91-98
7. Christian Rembe, Rishi Kant, Richard S. Muller. Optical measurement methods to study dynamic behavior in MEMS[C]. Proc. SPIE, 2001, 4400: 127-137
8. Alain Bosseboeuf, Jean Paul Gilles, Kaman Danaie et al.. A versatile microscopic profilometer-vibrometer for static and dynamic characterization of micromechanical devices[C]. Proc. SPIE, 1999, 3825: 123-133
9. Petra Aswendt, Claus-Dieter Schmidt, Dirk Zielke et al.. ESPI solution for non-contacting MEMS on wafer testing[J]. Opt. Lasers Engng., 2003, 40(5-6): 501-515
10. Petra Aswendt, Claus-Dieter Schmidt, Dirk Zielke et al.. Inspection system for MEMS characterization on wafer level using ESPI[C]. Proc. SPIE, 2001, 4400: 43-50
11. Marc P. Geoges, Philippe C. Lemaire. Real-time stroboscopic holographic interferometry using sillenite crystals for the quantitative analysis of vibrations[J]. Opt. Commun., 1998, 145(1-6): 249-257