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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5343, Issue , 2004, Pages 63-69

Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS

(3) Gorecki, Christophe a Józwik, Michal b Sałbut, Leszek b

b WARSAW UNIVERSITY OF TECHNOLOGY (Poland)

Author keywords

Interferometry; MEMS actuators; Modes of vibration; Out of plane displacements; PECVD deposition; Residual stress; Stroboscopy

Indexed keywords

ACTUATORS; COATINGS; COMPOSITE MICROMECHANICS; HOLOGRAPHY; INTERFEROMETRY; MATERIALS SCIENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUALITY CONTROL; RESIDUAL STRESSES; STROBOSCOPES; VIBRATIONS (MECHANICAL);

MEMS ACTUATORS; MODES OF VIBRATION; OUT-OF-PLANE DISPLACEMENTS; PECVD DEPOSITION;

MICROELECTROMECHANICAL DEVICES;

EID: 2142761192 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.524324 Document Type: Conference Paper

Times cited : (5)

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