Azimuth alignment in photoelastic modulation ellipsometry at a fixed incident angle

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 6 A, 2002, Pages 3981-3986

  Wang, Meng Wei ^a   Chao, Yu Faye ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Alignment; Ellipsometry; Photoelastic modulator

Indexed keywords

APPROXIMATION THEORY; BESSEL FUNCTIONS; LIGHT MODULATION; LIGHT MODULATORS; LIGHT POLARIZATION; LINEAR EQUATIONS; PHOTOELASTICITY; THIN FILMS;

AZIMUTH ALIGNMENT; INTENSITY RATIO TECHNIQUE; PHOTOELASTIC MODULATION ELLIPSOMETRY; PHOTOELASTIC MODULATOR;

ELLIPSOMETRY;

EID: 0036614192     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.3981     Document Type: Article

References (14)