Static and dynamic characterization of polysilicon surface-micromachined actuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3876, Issue , 1999, Pages 162-170

  Laible, Volker ^a   Hagelin, Paul M ^a   Solgaard, Olav ^a   Obermeier, Ernst ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER CONTROL SYSTEMS; ELECTROSTATIC DEVICES; GRAPHICAL USER INTERFACES; HELIUM NEON LASERS; LASER BEAMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; MIRRORS; SILICON;

ELECTROSTATIC MICROACTUATOR; POLYSILICON; SURFACE MICROMACHINING;

MICROACTUATORS;

EID: 0033334458     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)