Surface plasmons for nanofabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5347, Issue , 2004, Pages 215-223

  Kik, Pieter G ^a,b   Maier, Stefan A ^a   Atwater, Harry A ^a  

^a California Institute of Technology   (United States)

^b UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

Contact printing; Lithography; Nanoparticles; Near field; Pattern replication; Perfect lens; Surface plasmon

Indexed keywords

CONTACT PRINTING; NANOPARTICLES; NEAR FIELD; PATTERN REPLICATION; PERFECT LENS; SURFACE PLASMON;

DIFFRACTION; IMAGING TECHNIQUES; INTEGRATED CIRCUITS; PHOTOLITHOGRAPHY; PHOTORESISTS; PRINTING; REFLECTION; SURFACE PLASMON RESONANCE; ULTRAVIOLET RADIATION; X RAY ANALYSIS;

NANOTECHNOLOGY;

EID: 2142683032     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.532613     Document Type: Conference Paper

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