Nickel and copper electroplating of proton beam micromachined SU-8 resist

Microsystem Technologies

Volumn 8, Issue 6, 2002, Pages 383-386

  Van Kan, J A ^a   Rajta, I ^a   Ansari, K ^a   Bettiol, A A ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTROPLATING; LITHOGRAPHY; MICROSTRUCTURE; MOLDS; PROTON BEAMS;

PROTON BEAM MICROMACHINING (PBM);

MICROMACHINING;

EID: 0036751545     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-001-0139-5     Document Type: Article

References (11)

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