Microstructural characterization of thin carbon films deposited from hydrocarbon mixtures

Surface and Coatings Technology

Volumn 182, Issue 2-3, 2004, Pages 131-137

  Taylor, Craig A ^a   Wayne, Mark F ^a   Chiu, Wilson K S ^a  

^a UNIVERSITY OF CONNECTICUT   (United States)

Author keywords

Chemical vapor deposition; Environmental scanning electron microscopy; Hydrocarbon mixture; Pyrolytic carbon; Raman spectroscopy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GRAPHITIZATION; HYDROCARBONS; THERMAL EFFECTS; THIN FILMS;

CARBON FILMS; SPECIFIC GAS COMBINATIONS; SUBSTRATE TEMPERATURES;

COATINGS;

MICROSTRUCTURE;

EID: 2142660238     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.08.061     Document Type: Article

References (22)

1. Hu Z.J. Hüttinger K.J. Carbon 40 2002 624-628
2. Brüggert M. Hu Z. Hüttinger K.J. Carbon 37 1999 2021-2030
3. Hu Z.J. Hüttinger K.J. Carbon 39 2001 433-441
4. Palmer H.B. Lahaye J. Hou K.C. J. Phys. Chem. 72 1968 348-353
5. Feron O. Langlais F. Naslain R. Thebault J. Carbon 37 1999 1343-1353
6. Xu X. Pacey P.D. Carbon 39 2001 1835-1847
7. Becker A. Hüttinger K.J. Carbon 36 1998 177-199
8. Becker A. Hüttinger K.J. Carbon 36 1998 201-211
9. Becker A. Hüttinger K.J. Carbon 36 1998 213-224
10. Becker A. Hu Z. Hüttinger K.J. J. Phys. IV France 9 1999
11. P.A. Tesner, Chemistry and Physics of Carbons 19 (1984) 65-161
12. Delhaes P. Carbon 40 2002 641-657
13. Huff R.G. DiMarcello F.V. Hart A.C.Jr. Walker K.L. Mater. Res. Soc. Symp. Proc. 172 1990 57-64
14. E.A. Lindholm, J. Li, A.S. Hokansson, J. Abramczyk, IWCS, Atlantic City, NJ, 1999, pp. 672-679
15. Koguchi M. Hirabayashi K. Kokura K. J. Ceram. Soc. Jpn. Int. Ed. 101 1993 293-296
16. P.J. Lemaire, K.L. Walker, K.S. Kranz, R.G. Huff, F.V. DiMarcello, Technical Digest: Symposium Optical Fiber Measurement 792 (1990) 43-48
17. Taylor C.A. Chiu W.K.S. Surf. Coat. Technol. 168 2003 1-11
18. Knight D.S. White W.B. J. Mater. Res. 4 1989 385-393
19. Tuinstra F. Koenig J.L. J. Chem. Phys. 53 1970 1126-1130
20. Dennison J.R. Holtz M. Swan G. Spectroscopy 11 2001 38-46
21. Nakamizo M. Kammereck R. Walker P.L.Jr. Carbon 12 1974 259-267
22. Tsai H. Bogy D.B. J. Vac. Sci. Technol. A 6 1987 3287-3312