Chemistry and kinetics of chemical vapor deposition of pyrocarbon. VIII. Carbon deposition from methane at low pressures

Carbon

Volumn 39, Issue 3, 2001, Pages 433-441

  Hu, Zijun ^a   Hüttinger, Klaus J ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ADSORPTION; ARGON; CHEMICAL VAPOR DEPOSITION; DISSOCIATION; HYDROGEN; INFILTRATION; METHANE; PYROLYSIS; REACTION KINETICS; SATURATION (MATERIALS COMPOSITION);

CHEMICAL VAPOR INFILTRATION; PYROLYTIC CARBON;

CARBON;

EID: 0342592152     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0008-6223(00)00143-3     Document Type: Article

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