Pre-sliding tangential deflections can govern the friction of MEMS devices

Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004

Volumn , Issue PART A, 2004, Pages 113-116

  Corwin, Alex D ^a   Street, Mark D ^b   Carpick, Robert W ^b   Ashurst, William R ^c   De Boer, Maarten P ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

^c AUBURN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ADHESION; ELECTROSTATICS; FRICTION; LINEAR SYSTEMS; NANOTECHNOLOGY; NATURAL FREQUENCIES; POLYSILICON; POSITION CONTROL;

NANOTRACTORS; OPTICAL METROLOGY; STATIC FRICTION; TANGENTIAL FORCE;

MICROELECTROMECHANICAL DEVICES;

EID: 21244495695     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/trib2004-64360     Document Type: Conference Paper

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