Preparation and characterization of organic thin films on substrates and self-supporting films by RF sputtering of polyimide films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 4 A, 2005, Pages 1987-1990

  Ren, Yue ^a   Baba, Mamoru ^a   Oishi, Yoshiyuki ^a  

^a IWATE UNIVERSITY   (Japan)

Author keywords

Dry process; Organic thin films; Polyimide; Sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT ABSORPTION; POLYIMIDES; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

DRY PROCESS; ORGANIC THIN FILMS; POLYMER MATERIALS; RADIO-FREQUENCY SPUTTERING;

THIN FILMS;

EID: 21244485069     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.1987     Document Type: Article

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