Vapor deposition of polyimide: Segregation of partially reacted species at the polyimide/Si (100) interface

Thin Solid Films

Volumn 305, Issue 1-2, 1997, Pages 26-29

  Liberman, Vladimir ^a   Malba, Vincent ^a   Bernhardt, Anthony F ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Adhesion; Deposition process; Fourier transform infrared spectroscopy; Polymers

Indexed keywords

ADHESION; AROMATIC COMPOUNDS; CURING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INTERDIFFUSION (SOLIDS); INTERFACES (MATERIALS); MONOMERS; POLYIMIDES; SEMICONDUCTING SILICON; VAPOR DEPOSITION;

OXYDIANILINE; PYROMELLITIC DIANHYDRIDE;

PLASTIC FILMS;

EID: 0031212563     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00117-X     Document Type: Article

References (11)

1. M. Iijima and Y. Takahashi, U.S. Patent #4,624,867, 1986.
2. J.R. Salem, F.O. Sequeda, J. Duran, W.Y. Lee and R.M. Yang, J. Vac. Sci. Technol., 4 (1986) 369.
3. S.P. Kowalczyk, Y.H. Kim, G.F. Walker and J. Kim, Appl. Phys. Lett., 52 (1988) 375.
4. S.P. Kowalczyk and J.L. Jordan-Sweet, Chem. Mater., 1 (1989) 592.
5. V. Malba, V. Liberman and A.F. Bernhardt, J. Vac. Sci. Technol. A, (1997), to be published.
6. C.D. Dimitrakopoulos, E.S. Machlin and S.P. Kowalczyk, Macromolecules, 29 (1996) 5818.
7. C.A. Pryde, J. Polym. Sci. A, 27 (1989) 711.
8. T.P. Russell, H. Gugger and J.D. Swalen, J. Polym. Sci., Polym. Phys., 21 (1983) 1745.
9. S.P. Kowallzyk, C.D. Dimitrakopoulos and S.E. Molis, Mater. Res. Soc. Symp. Proc., 227 (1991) 55.
10. F.M. Mirabella, Jr., Internal Reflection Spectroscopy Marcel Dekker, New York, 1993.
11. Nicolet Instruments, Madison, WI, private communication, 1995.