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Volumn 2, Issue , 2004, Pages 1274-1278

Position control of a 3 DOF compliant micro-motion stage

Author keywords

[No Author keywords available]

Indexed keywords

JACOBIAN MATRIX; KINEMATIC MODELS; MICRO-MOTION STAGE; PARALLEL STRUCTURE;

EID: 21244448467     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (14)

References (10)
  • 1
    • 0018222158 scopus 로고
    • Piezodriven 50-μm range stage with subnanometer resolution
    • F. Scire and C. Teague, "Piezodriven 50-μm range stage with subnanometer resolution," Rev. Sci. Instrum, 49(12), 1735-1741, 1978.
    • (1978) Rev. Sci. Instrum , vol.49 , Issue.12 , pp. 1735-1741
    • Scire, F.1    Teague, C.2
  • 2
    • 0028499414 scopus 로고
    • A linear scheme for the displacement analysis of micropositioning stages with flexure hinges
    • I. Her and J. C. Chang, "A linear scheme for the displacement analysis of micropositioning stages with flexure hinges," Journal of Mechanical Design, Trans. ASME, 116, 770-776, 1994.
    • (1994) Journal of Mechanical Design, Trans. ASME , vol.116 , pp. 770-776
    • Her, I.1    Chang, J.C.2
  • 3
    • 0033335330 scopus 로고    scopus 로고
    • A new piezodriven precision micropositioning stage utilizing flexure hinges
    • P. Gao, S. Swei and Z. Yuan, "A new piezodriven precision micropositioning stage utilizing flexure hinges," Nanotechnology, 10, 394-398, 1999.
    • (1999) Nanotechnology , vol.10 , pp. 394-398
    • Gao, P.1    Swei, S.2    Yuan, Z.3
  • 4
    • 0031176660 scopus 로고    scopus 로고
    • Optimal design of a flexure hinge based XYθ wafer stage
    • J. Ryu, D. Gweon and K. Moon, "Optimal design of a flexure hinge based XYθ wafer stage," Precision Engineering, 21, 18-28, 1997.
    • (1997) Precision Engineering , vol.21 , pp. 18-28
    • Ryu, J.1    Gweon, D.2    Moon, K.3
  • 5
    • 0004273610 scopus 로고    scopus 로고
    • Chap.1, John Wiley & Sons, Inc., New York
    • L. Howell, Compliant Mechanisms, Chap.1, John Wiley & Sons, Inc., New York, 2001.
    • (2001) Compliant Mechanisms
    • Howell, L.1
  • 6
    • 0032305433 scopus 로고    scopus 로고
    • Dynamic modeling of parallel robots for computed-torque control implementation
    • A. Codourey, "Dynamic modeling of parallel robots for computed-torque control implementation," The International Journal of Robotics Research, 17(12), 1325-1336, 1998.
    • (1998) The International Journal of Robotics Research , vol.17 , Issue.12 , pp. 1325-1336
    • Codourey, A.1
  • 7
    • 0345490471 scopus 로고
    • Direct kinematic and dynamics of a planar three-dof parallel manipulator
    • O. Ma and J. Angeles, "Direct kinematic and dynamics of a planar three-dof parallel manipulator," Advances in Design Automation, 2, 313-320, 1993.
    • (1993) Advances in Design Automation , vol.2 , pp. 313-320
    • Ma, O.1    Angeles, J.2
  • 9
    • 0030108494 scopus 로고    scopus 로고
    • A loop-closure theory for the analysis and synthesis of compliant mechanisms
    • L. L. Howell and A. Midha, "A Loop-Closure Theory for the Analysis and Synthesis of Compliant Mechanisms," Journal of Mechanical Design, 118, 121-125, 1996.
    • (1996) Journal of Mechanical Design , vol.118 , pp. 121-125
    • Howell, L.L.1    Midha, A.2
  • 10
    • 0036469932 scopus 로고    scopus 로고
    • The constant-jacobian method for kinematics of a Three-DOF planar micro-motion stage
    • W. J. Zhang, J. Zou, G. Watson, W. Zhao, G. Zong and S. Bi, "The Constant-Jacobian Method for Kinematics of a Three-DOF Planar Micro-Motion Stage," Journal of Robotic Systems, 19(2), 63-72, 2002.
    • (2002) Journal of Robotic Systems , vol.19 , Issue.2 , pp. 63-72
    • Zhang, W.J.1    Zou, J.2    Watson, G.3    Zhao, W.4    Zong, G.5    Bi, S.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.