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Volumn 249, Issue 1-4, 2005, Pages 203-207
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Effects of Al content on properties of Al-N codoped ZnO films
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Author keywords
Al N codoping; Reactive magnetron sputtering; X ray photoelectron spectroscopy (XPS); ZnO
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Indexed keywords
ALUMINUM;
CARRIER CONCENTRATION;
CHEMICAL BONDS;
DOPING (ADDITIVES);
MAGNETRON SPUTTERING;
NITROGEN;
X RAY PHOTOELECTRON SPECTROSCOPY;
ZINC OXIDE;
AL-N DOPING;
CODOPING;
REACTIVE MAGNETRON SPUTTERING;
ZNO;
THIN FILMS;
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EID: 21244438715
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2004.11.073 Document Type: Article |
Times cited : (42)
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References (15)
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