On the spatial resolution and nanoscale feature visibility in scanning electron microscopy

Advances in Imaging and Electron Physics

Volumn 123, Issue C, 2002, Pages 375-398

  Merli, P G ^a   Morandi, V ^a,b  

^a CNR Consiglio Nazionale delle Ricerche   (Italy)

^b National Institute for the Physics of Matter (INFM)   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21144448303     PISSN: 10765670     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1076-5670(02)80070-2     Document Type: Article

References (30)

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