Spatial resolution and energy filtering of backscattered electron images in scanning electron microscopy

Ultramicroscopy

Volumn 88, Issue 2, 2001, Pages 139-150

  Merli, P G ^a   Migliori, A ^a   Morandi, V ^a   Rosa, R ^a,b  

^a CNR   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

Backscattered electrons imaging; Compositional contrast; Scanning electron microscopy

Indexed keywords

BACKSCATTERING; COMPUTER SIMULATION; FILTRATION; MULTILAYERS; SEMICONDUCTOR MATERIALS;

SPATIAL RESOLUTIONS;

SCANNING ELECTRON MICROSCOPY;

ARTICLE; CONTRAST ENHANCEMENT; CONTROLLED STUDY; ELECTRON; NONHUMAN; SCANNING ELECTRON MICROSCOPY; SIMULATION; THICKNESS; ULTRASTRUCTURE ANALYSIS AND ELECTRON MICROSCOPY;

EID: 0035001315     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(00)00132-7     Document Type: Article

References (26)

1. S. Franchi, P.G. Merli, A. Migliori, K. Ogura, A. Ono, Electron Microsc. (1990) 380.
2. K. Ogura, A. Ono, S. Franchi, P.G. Merli, A. Migliori, Electron Microsc. (1990) 404.
3. O.C. Wells Appl. Phys. Lett. 19 1971 232
4. O.C. Wells Scanning Electron Microscopy 1974 McGraw-Hill New York
5. O.C. Wells, IITRI/SEM 1977, 747.
6. K. Murata, M. Yasuda, H. Kawata, IITRI/SEM 1992, 943.
7. M. Yasuda H. Kawata K. Murata J. Appl. Phys. 77 1995 4076
8. M. Yasuda H. Kawata K. Murata Phys. Stat. Sol. A 152 1996 133
9. O.C. Wells, M. Nacucchi, in: P.G. Merli, M. Vittori Antisari (Eds.), Electron Microscopy in Materials Science, World Scientific, Singapore, 1992, p. 479.
10. P.G. Merli M. Nacucchi Ultramicroscopy 50 1993 83
11. N. Rosenberg C.Z. Jiang P. Morin Ultramicroscopy 76 1999 83
12. C.Z. Jiang N. Rosenberg P. Morin J. Microsc. 198 2000 17
13. A. Armigliato A. Desalvo R. Rinaldi R. Rosa J. Phys. D. 12 1979 1299
14. A. Desalvo R. Rosa J. Phys. D. 20 1987 790
15. F. Salvat, J.M. Fernandez-Varea, R. Mayol, in: P.G. Merli, M. Vittori-Antisari (Eds.), Proceedings of the International School on Elect. Mic. in Material Science, World Scientific, Singapore, 1992, pp. 603–620.
16. H.A. Bethe Ann. Phys., Lpz. 5 1930 325
17. P. Duncumb S.J.B. Reed Quantitative electron probe microanalysis. NBS Special Pub. 289 1968 133
18. T.S. Raho-Sahib D.B. Wittry J. Appl. Phys. 45 1974 5060
19. D.C. Joy S. Luo Scanning 11 1989 176
20. P.G. Merli A. Migliori M. Nacucchi M. Vittori Antisari Ultramicroscopy 65 1996 23
21. P.G. Merli A. Migliori M. Nacucchi D. Govoni G. Mattei Ultramicroscopy 60 1995 83
22. M. Kotera S. Yamaguchi T. Fujiwara H. Suga Jpn. J. Appl. Phys. 31 1992 4531
23. A.C. De Riccardis P.G. Merli M. Nacucchi L. Tafner MiKrochim. Acta 114/115 1994 261
24. A. Konkol G.R. Booker P.R. Wilshaw Ultramicroscopy 58 1995 233
25. L. Reimer, P. Wahlbring, ICEM 1994, 355.
26. A.N. Broers, IITRI/SEM (Part I) 1974, 9.