Experimental study on thermal conductivity of SiO2 thin film

Dongnan Daxue Xuebao (Ziran Kexue Ban)/Journal of Southeast University (Natural Science Edition)

Volumn 35, Issue 3, 2005, Pages 396-399

  Hu, Mingyu ^a   Chen, Zhen ^a   Yang, Juekuan ^a   Zhuang, Ping ^a   Zhu, Jian ^b   Chen, Yunfei ^a  

^a SOUTHEAST UNIVERSITY   (China)

^b CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION   (China)

Author keywords

3 Method; SiO2 thin film; Thermal conductivity

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); IMPURITIES; PLASMAS; TEMPERATURE; THERMAL CONDUCTIVITY; THIN FILMS;

3Ω METHOD; CALLAWAY MODEL;

SILICA;

EID: 21144447815     PISSN: 10010505     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)

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