Production and characterization of a hydraulic microactuator

Journal of Micromechanics and Microengineering

Volumn 15, Issue 7, 2005, Pages

  De Volder, Michäl ^a   Peirs, Jan ^a   Reynaerts, Dominiek ^a   Coosemans, Johan ^b   Puers, Robert ^b   Smal, Olivier ^c   Raucent, Benoit ^c  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b Katholieke Universiteit Leuven   (Belgium)

^c UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ASSEMBLY; FORCE CONTROL; HYDRAULIC MACHINERY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PRESSURE EFFECTS; PRODUCTION;

ASSEMBLY TECHNIQUES; HYDRAULIC MICROACTUATORS; MICROMACHANICS; MICROSCALE;

MICROACTUATORS;

EID: 21044459978     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/7/003     Document Type: Article

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