Rear surface spallation on single-crystal silicon in nanosecond laser micromachining

Journal of Applied Physics

Volumn 97, Issue 10, 2005, Pages

  Ren, Jun ^a   Orlov, Sergei S ^a   Hesselink, Lambertus ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOSUTIC IMPEDANCE MATCHING; NANOSECOND LASER MICROMACHINING; REAR SURFACE SPALLATION; THRESHOLD ENERGY;

BRITTLENESS; LASER ABLATION; LASERS; MICROMACHINING; SHOCK PROBLEMS; SINGLE CRYSTALS; SPALLING; THRESHOLD VOLTAGE;

SILICON;

EID: 20944447515     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1896095     Document Type: Article

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