Nanosecond laser silicon micromachining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5339, Issue , 2004, Pages 382-393

  Ren, Jun ^a   Orlov, Sergei S ^a   Hesselink, Lambertus ^a   Howard, Helen ^b   Conneely, Alan ^b  

^a Stanford University   (United States)

^b NATIONAL UNIVERSITY OF IRELAND   (Ireland)

Author keywords

Laser ablation; Metastable liquid; Nanosecond; Plasma; Shock wave; Silicon; Thermal evaporation

Indexed keywords

ACOUSTIC EMISSIONS; LASER PULSES; MATHEMATICAL MODELS; MICROMACHINING; PLASMAS; SHOCK WAVES; SILICON; ULTRAVIOLET RADIATION;

LASER INTENSITY; METASTABLE LIQUIDS; NANOSECOND; THERMAL EVAPORATION;

LASER APPLICATIONS;

EID: 5444247927     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.529442     Document Type: Conference Paper

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