Micromachined chemical sensor with dual-transduction mechanisms

Applied Physics Letters

Volumn 86, Issue 17, 2005, Pages 1-3

  Chen, Ing Shin ^a   Stawasz, Michele ^a   DiMascio, Susan K ^a   Welch, James J ^a   Neuner, Jeffrey W ^a   Chen, Philip S H ^a   DiMeo Jr , Frank ^a  

^a ENTEGRIS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTOMETRIC TRANSDUCTION MECHANISM; DUAL-TRANSDUCTION MECHANISMS; MICROMACHINED CHEMICAL SENSORS; MICROPLATE BENDING;

BENDING (DEFORMATION); CALORIMETRY; CMOS INTEGRATED CIRCUITS; ELECTRIC RESISTANCE; HYDROGENATION; MICROMACHINING; PALLADIUM; STRAIN; YTTRIUM;

CHEMICAL SENSORS;

EID: 20844461309     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1915541     Document Type: Article

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