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Volumn 198, Issue 1-3 SPEC. ISS., 2005, Pages 406-413
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Characterization of barium strontium titanate thin films for tunable microwave and DRAM applications
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Author keywords
Barium strontium titanate; Dielectric constant; DRAM; Microwave; Pulsed laser deposition; Tunability
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
BARIUM COMPOUNDS;
CAPACITORS;
DYNAMIC RANDOM ACCESS STORAGE;
PULSED LASER DEPOSITION;
STRONTIUM COMPOUNDS;
X RAY DIFFRACTION;
BST-BASED CAPACITORS;
LASER ENERGY;
TUNABLE MICROWAVE APPLICATIONS;
VECTOR NETWORK ANALYZERS (VNA);
THIN FILM CIRCUITS;
COATING;
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EID: 20744433539
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.10.044 Document Type: Article |
Times cited : (39)
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References (20)
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