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Volumn 526, Issue , 1998, Pages 211-217
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Synthesis and characterization of ferroelectric thin films by KrF excimer laser ablation for memory applications
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITORS;
CRYSTALLOGRAPHY;
DEPOSITION;
EXCIMER LASERS;
FERROELECTRIC MATERIALS;
FILM GROWTH;
LANTHANUM COMPOUNDS;
LASER ABLATION;
LEAD COMPOUNDS;
RANDOM ACCESS STORAGE;
SYNTHESIS (CHEMICAL);
THIN FILMS;
LANTHANUM STRONTIUM COBALT OXIDES;
LEAD ZIRCONATE TITANATE;
NONVOLATILE RANDOM ACCESS MEMORIES (NVRAM);
DIELECTRIC FILMS;
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EID: 0032317749
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-526-211 Document Type: Conference Paper |
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Times cited : (2)
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References (13)
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