MgO insulating films prepared by sol-gel route for SiC substrate

Journal of the European Ceramic Society

Volumn 25, Issue 12 SPEC. ISS., 2005, Pages 2795-2798

  Bondoux, Céline ^a   Prené, Philippe ^a   Belleville, Philippe ^a   Guillet, François ^a   Lambert, Sébastien ^a   Minot, Benoît ^a   Jérisian, Robert ^b  

^a CEA LE RIPAULT   (France)

^b STMICROELECTRONICS   (France)

Author keywords

Electrical properties; Films; Insulator; MgO; SiC; Sol gel processing

Indexed keywords

ENERGY GAP; FREQUENCIES; INSULATING MATERIALS; MAGNESIA; MICROSTRUCTURE; MICROWAVES; PERMITTIVITY; SEMICONDUCTING FILMS; SOL-GELS;

HIGH-TEMPERATURE DEVICES; INSULATING FILMS; MICROWAVE FREQUENCIES; PRECURSOR SOLUTIONS;

SILICON CARBIDE;

FILM;

EID: 20444455854     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2005.03.142     Document Type: Article

References (10)

1. J.B. Casady and R.W. Johnson Status of silicon carbide (SiC) as a wide band-gap semiconductor for high-temperature applications: A review Solid State Electron. 39 1996 1409-1422
2. Y.S. Park SiC materials and devices Semiconductor and Semimetals Vol 52 1998 Academic Press
3. C. Raynaud Silica films on silicon carbide: A review of electrical properties and device applications J. Non-Cryst. Solids 280 2001 1-31
4. C.-M. Zetterling M. Östling K. Wongchotigol M.G. Spencer X. Tang C.I. Harris et al. Investigation of AlN grown by metal-organic chemical-vapor deposition on SiC J. Appl. Phys. 82 1997 2990-2995
5. L.A. Lipkin and J.W. Palmour Insulator investigation on SiC for improved reliability IEEE Trans. Electron Dev. 46 1999 546-548
6. Palik E.D. ed., Handbook of Optical Constants in Solids II, 1991.
7. J.-G. Yoon and Y.J. Kwag Structural characterization of sol-gel derived MgO thin film on Si substrate J. Korean Phys. Soc. 31 1997 613-616
8. P. Vuoristo J. Wahlroos T. Mäntylä and P. Kettuen Electrical insulating properties of RF-sputterd MgO coatings Thin Solid Films 166 1988 255-262
9. T.I. Danilina and K.I. Smirnova Microelectronika 5 1976 286-289
10. A. Singh and R. Pratap A.C. electrical breakdown in thin MgO films Thin Solid Films 87 1982 147-150