Transfer of continuous-relief diffractive structures into diamond by use of inductively coupled plasma dry etching

Optics Letters

Volumn 26, Issue 22, 2001, Pages 1752-1754

  Karlsson, Mikael ^a   Hjort, Klas ^a   Nikolajeff, Fredrik ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTIVE OPTICAL ELEMENTS (DOE);

DIAMONDS; DRY ETCHING; ELECTRON BEAM LITHOGRAPHY; INDUCTIVELY COUPLED PLASMA; SOLID STATE LASERS;

DIFFRACTIVE OPTICS;

EID: 0041666999     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.26.001752     Document Type: Article

References (8)

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