Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate

Journal of Applied Physics

Volumn 97, Issue 5, 2005, Pages

  Antos, Roman ^a   Pistora, Jaromir ^b   Ohlidal, Ivan ^a,e   Postava, Kamil ^a   Mistrik, Jan ^a   Yamaguchi, Tomuo ^a   Visnovsky, Stefan ^c   Horie, Masahiro ^d  

^a SHIZUOKA UNIVERSITY   (Japan)

^b VSB TECHNICAL UNIVERSITY OF OSTRAVA   (Czech Republic)

^c CHARLES UNIVERSITY   (Czech Republic)

^d DAINIPPON SCREEN MFG CO LTD   (Japan)

^e MASARYK UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

BACKREFLECTIONS; CRITICAL DIMENSION (CD); OPTICAL RESPONSE; SPECTROSCOPIC ELLIPSOMETRY (SE);

COMPUTER SIMULATION; CRYSTALS; DIFFRACTION GRATINGS; LIGHT REFLECTION; OPTICAL VARIABLES MEASUREMENT; PHOTONS; TRANSPARENCY;

ELLIPSOMETRY;

EID: 20444436344     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1854728     Document Type: Article

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