The role of chemical species in the passivation of <100> silicon surfaces by HF in water-ethanol solutions

Journal of the Electrochemical Society

Volumn 143, Issue 12, 1996, Pages 4059-4066

  Garrido, B ^a   Montserrat, J ^b   Morante, J R ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; COMPOSITION EFFECTS; CRYSTAL ORIENTATION; DISSOCIATION; ETCHING; ETHANOL; HYDROFLUORIC ACID; METAL CLEANING; PASSIVATION; SOLUTIONS; SURFACE ROUGHNESS; WATER;

CHEMICAL SPECIES; DIMER ETCHING REACTIONS; HOMOCONJUGATION REACTIONS;

SILICON;

EID: 0030410694     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837336     Document Type: Article

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