AFM-based micro/nano-scale lithography of poly(dimethylsiloxane) - Stick-slip on a 'soft' polymer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5650, Issue , 2005, Pages 474-482

  Watson, Jolanta A ^a   Myhra, Sverre ^a,b   Brown, Christopher L ^a,c   Watson, Gregory S ^a  

^a GRIFFITH UNIVERSITY   (Australia)

^b UNIVERSITY OF OXFORD   (United Kingdom)

^c CRC for Microtechnology   (Australia)

Author keywords

AFM; Nanostructures; PDMS; Soft lithography; Surface modification

Indexed keywords

POLY(DIMETHYLSILOXANE) (PDMS); SOFT LITHOGRAPHY; SURFACE RELAXATION; THERMAL SHOCK;

ATOMIC FORCE MICROSCOPY; ELASTOMERS; ELECTRON BEAMS; MACHINE TOOLS; RUBBER; SURFACE TREATMENT;

NANOTECHNOLOGY;

EID: 20344395887     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.582650     Document Type: Conference Paper

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