A simple method to grow textured (1 1 1) diamond thin films in a hot-filament CVD system

Applied Surface Science

Volumn 207, Issue 1-4, 2003, Pages 121-127

  Zhang, G F ^a   Buck, V ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

(1 1 1) textured growth; Diamond film; Filament temperature; Hot filament CVD

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; SYNTHESIS (CHEMICAL); TEXTURES; THIN FILMS;

HOT-FILAMENT DEPOSITION;

DIAMOND FILMS;

EID: 0037470337     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)01285-0     Document Type: Article

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