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Volumn 144-147, Issue , 2005, Pages 929-932

XUV-laser induced ablation of PMMA with nano-, pico-, and femtosecond pulses

(22)  Juha, L a   Bittner, M a,b   Chvostova, D a   Letal, V d   Krasa, J a   Otcenasek, Z a,d   Kozlova, M a   Polan, J a   Prag A R a   Rus, B a   Stupka, M a   Krzywinski, J c,e   Andrejczuk, A c,f   Pelka, J B c,e   Sobierajski, R g   Ryc, L h   Feldhaus, J c   Boody, F P i   Grisham, M E j   Vaschenko, G O j   more..

c DESY   (Germany)

Author keywords

Ablation; PMMA; Poly(methyl methacrylate); Pulse duration effects; Soft X ray lasers; Wavelength effects; XUV lasers

Indexed keywords

ABLATION; ATOMIC FORCE MICROSCOPY; LASER APPLICATIONS; LASER PULSES; SCANNING; SILICON WAFERS; ULTRAVIOLET RADIATION;

EID: 20244378085     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2005.01.258     Document Type: Conference Paper
Times cited : (22)

References (23)
  • 17
    • 17444394224 scopus 로고    scopus 로고
    • Ph.D. Thesis, University of California at Berkeley, Berkeley
    • A.T. Anderson, Ph.D. Thesis, University of California at Berkeley, Berkeley, 1996.
    • (1996)
    • Anderson, A.T.1
  • 23


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.