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Volumn 144-147, Issue , 2005, Pages 929-932
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XUV-laser induced ablation of PMMA with nano-, pico-, and femtosecond pulses
a a,b a d a a,d a a a a a c,e c,f c,e g h c i j j more.. |
Author keywords
Ablation; PMMA; Poly(methyl methacrylate); Pulse duration effects; Soft X ray lasers; Wavelength effects; XUV lasers
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Indexed keywords
ABLATION;
ATOMIC FORCE MICROSCOPY;
LASER APPLICATIONS;
LASER PULSES;
SCANNING;
SILICON WAFERS;
ULTRAVIOLET RADIATION;
PULSE DURATION EFFECTS;
SOFT X-RAY LASERS;
WAVELENGTH EFFECTS;
XUV LASERS;
POLYMETHYL METHACRYLATES;
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EID: 20244378085
PISSN: 03682048
EISSN: None
Source Type: Journal
DOI: 10.1016/j.elspec.2005.01.258 Document Type: Conference Paper |
Times cited : (22)
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References (23)
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