Imaging characteristics of poly(methyl methacrylate) at vacuum ultraviolet wavelengths

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 828-832

  Ferincz, I E ^a,b   Toth Cs ^a,c   Young, J F ^a  

^a RICE UNIVERSITY   (United States)

^b UNIVERSITY OF SZEGED   (Hungary)

^c WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5844241339     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589493     Document Type: Article

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