Miniature fiber-optic pressure sensor for turbine engine

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5590, Issue , 2004, Pages 11-18

  Zhu, Yizheng ^a   Pickrell, Gary ^a   Wang, Xingwei ^a   Xu, Juncheng ^a   Yu, Bing ^a   Han, Ming ^a   Cooper, Kristie ^a   Wang, Anbo ^a   Ringshia, Aditya ^b   Ng, Wing ^b  

^a Virginia Polytechnic Institute and State University   (United States)

^b VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

Author keywords

Fiber optic sensor; Miniature; Pressure sensor

Indexed keywords

COEFFICIENT OF THERMAL EXPANSION (CTE); COMPONENT TESTING SYSTEM (CTS); MINIATURE; PRESSURE SENSORS;

DEMODULATION; FABRY-PEROT INTERFEROMETERS; FREQUENCIES; GAS TURBINES; OPTICAL RESOLVING POWER; SENSITIVITY ANALYSIS; SIGNAL INTERFERENCE; THERMAL EXPANSION;

FIBER OPTIC SENSORS;

EID: 20144387001     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.575631     Document Type: Conference Paper

References (7)

1. D. Goustouridis, P. Normand, and D. Tsoukalas, "Ultraminiature silicon capacitive pressure-sensing elements obtained by silicon fusion bonding", Sens. Actuators A, vol. A68, pp. 269-274, 1998.
2. P. Melvås, E. Kälvesten, P. Enoksson, and G. Stemme, "A free-hanging strain-gauge for ultraminiaturized pressure sensors", Sens. Acuators A, vol. 97-98, pp. 75-82, 2002.
3. T. Katsumata, Y. Haga, K. Minami, and M. Esashi, "Micromachined 125 μm diameter ultra miniature fiber-optic pressure sensor for catheter," Trans. IEE Jpn., Part E, vol. 120-E, pp. 58-63, 2000.
4. E. Cibula, D. Donlagic, and C. Stropnik, "Miniature fiber optic pressure sensor for medical applications," in Proc. of IEEE Sensors 2002, First IEEE Int. Conf. on Sensors, Piscataway, NJ, 2002, vol. 1, pp.711-714.
5. D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, "A novel MEMS pressure sensor fabricated on a optical fiber," IEEE Photon. Technol. Lett., vol. 13, pp. 993-995, Sep. 2001.
6. T. Pangaribuan, K. Yamada, S. Jiang, H. Ohsawa, and M. Ohtsu, "Reproducible fabrication technique of nanometric tip diameter fibre probe for photon scanning tunneling microscope," Jpn. J. Appl. Phys., vol. 31, pp. 1302-1304, 1992.
7. A. Wang, H. Xiao, J. Wang, Z. Wang, W. Zhao, and R. G. May, "Self-calibrated interferometric-intensity-based optical fiber sensors," J. Lightwave Technol., vol. 19, pp. 1495-1501, 2001.