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Volumn 5645, Issue , 2005, Pages 372-378
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Hybrid nanocontact printing (HnCP) process technology
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Author keywords
Hybrid Nanocontact printing(HnCP); Nanocontact printing; SAM; UV Nano Imprint lithography(UV NIL)
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Indexed keywords
ELECTRONIC EQUIPMENT;
ETCHING;
GOLD;
HYDROPHOBICITY;
NANOSTRUCTURED MATERIALS;
PHOTOLITHOGRAPHY;
PRINTING;
SOLUTIONS;
THIN FILMS;
HYBRID NANOCONTACT PRINTING (HNCP);
NANOCONTACT PRINTING;
PATTERN TRANSFER;
UV NANO IMPRINT LITHOGRAPHY (UV-NIL);
NANOTECHNOLOGY;
ETCHING;
GOLD;
LITHOGRAPHY;
PRINTING;
SOLUTIONS;
THIN FILMS;
WATER REPELLENCE;
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EID: 20044371038
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.577244 Document Type: Conference Paper |
Times cited : (1)
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References (12)
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