Diamondlike carbon film deposition on a polycarbonate-tube inner wall using a cylindrical electrode with radio frequency glow discharge plasma

Journal of Applied Physics

Volumn 97, Issue 2, 2005, Pages

  Ohgoe, Yasuharu ^a   Hirakuri, Kenji K ^a  

^a TOKYO DENKI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CYLINDRICAL ELECTRODES; FILM DEPOSITION; GLOW DISCHARGE PLASMAS; HEMISPHERIC-TYPE ELECTRODES;

CHEMICAL VAPOR DEPOSITION; ELECTRIC INSULATORS; ELECTRODES; FREQUENCIES; GLOW DISCHARGES; PLASMAS; POLYCARBONATES; THREE DIMENSIONAL;

DIAMOND LIKE CARBON FILMS;

EID: 19944432682     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1832751     Document Type: Article

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