Rare-earth scandate single- and multi-layer thin films as alternative gate oxides for microelectronic applications

Microelectronic Engineering

Volumn 80, Issue SUPPL., 2005, Pages 150-153

  Heeg, T ^a   Wagner, M ^a   Schubert, J ^a   Buchal, Ch ^a   Boese, M ^a   Luysberg, M ^a   Cicerrella, E ^b   Freeouf, J L ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b OREGON HEALTH AND SCIENCE UNIVERSITY   (United States)

Author keywords

BaTiO 3; Candates; DyScO 3; GdScO 3; Laminates; LaScO 3; Multi layers; PLD; Titanates

Indexed keywords

BATIO3; DYSCO3; GDSCO3; LASCO3; MULTI-LAYERS; SCANDATES; TITANATES;

CRYSTALLINE MATERIALS; DIFFUSION; EPITAXIAL GROWTH; GATES (TRANSISTOR); LAMINATES; LEAKAGE CURRENTS; MICROELECTRONICS; PULSED LASER DEPOSITION; SCANDIUM COMPOUNDS; SEMICONDUCTING SILICON; THIN FILMS; TITANIUM COMPOUNDS; X RAY DIFFRACTION;

RARE EARTHS;

EID: 19944419478     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.04.058     Document Type: Conference Paper

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