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Applied Physics A: Materials Science and Processing

Volumn 69, Issue 7, 1999, Pages

Off-axis Pulsed Laser Deposition system for epitaxial oxide growth on substrates up to 2 inches in diameter

(5) Siegert, M a Zander, W a Lisoni, J a Schubert, J a Buchal, Ch a

a FORSCHUNGSZENTRUM JÜLICH (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4244025088 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390051528 Document Type: Article

Times cited : (17)

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