Effects of non-parallel combs on reliable operation conditions of capacitive inertial sensor for step and shock signals

Sensors and Actuators, A: Physical

Volumn 121, Issue 2, 2005, Pages 395-404

  Dong, Linxi ^a,b   Che, Lufeng ^b   Sun, Lingling ^a   Wang, Yuelin ^b  

^a HANGZHOU DIANZI UNIVERSITY   (China)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Capacitive sensor; Inertial sensor; Oblique electrode; Reliable operation condition; Step and pulse acceleration

Indexed keywords

ACCELERATION; ACCELEROMETERS; DAMPING; ELECTRODES; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; SENSORS;

CAPACITIVE SENSORS; INERTIAL SENSORS; OBLIQUE ELECTRODES; RELIABLE OPERATION CONDITION; STEP AND PULSE ACCELERATION;

SIGNAL PROCESSING;

EID: 19944361873     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.048     Document Type: Article

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