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Volumn 114, Issue 1, 2004, Pages 41-48

Reliable operation conditions of capacitive inertial sensor for step and shock signals

Author keywords

Capacitive sensor; Inertial sensor; Reliable operation condition; Step and pulse signal

Indexed keywords

ACCELEROMETERS; CAPACITORS; ELASTICITY; ELECTRODES; ELECTROMECHANICAL DEVICES; SENSORS; SHOCK WAVES; SIGNAL THEORY;

EID: 3042829673     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.02.037     Document Type: Article
Times cited : (18)

References (5)
  • 1
    • 0025698106 scopus 로고
    • An ASIC for high-resolution capacitive micro accelerometers
    • Leuthold H., Rudolf F. An ASIC for high-resolution capacitive micro accelerometers. Sens. Actuators A. 21-23:1990;278-281.
    • (1990) Sens. Actuators A , vol.21-23 , pp. 278-281
    • Leuthold, H.1    Rudolf, F.2
  • 2
    • 0028526888 scopus 로고
    • A surface micro machined silicon accelerometer with on chip detection circuitry
    • Kuehnel W., Sherman S. A surface micro machined silicon accelerometer with on chip detection circuitry. Sens. Actuators A. 45:1994;7-16.
    • (1994) Sens. Actuators A , vol.45 , pp. 7-16
    • Kuehnel, W.1    Sherman, S.2
  • 3
    • 0030234258 scopus 로고    scopus 로고
    • Electrostatic forces and their effects on capacitive mechanical sensors
    • Puers R., Lapadatu D. Electrostatic forces and their effects on capacitive mechanical sensors. Sens. Actuators A. 56:1996;203-210.
    • (1996) Sens. Actuators A , vol.56 , pp. 203-210
    • Puers, R.1    Lapadatu, D.2
  • 4
    • 0034275498 scopus 로고    scopus 로고
    • Effects of electrostatic forces generated by driving signal on capacitive sensing devices
    • Bao M., Yang H., Yin H., Shen S. Effects of electrostatic forces generated by driving signal on capacitive sensing devices. Sens. Actuators A. 84:2000;213-219.
    • (2000) Sens. Actuators A , vol.84 , pp. 213-219
    • Bao, M.1    Yang, H.2    Yin, H.3    Shen, S.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.