Immersion mask inspection with hybrid-microscopic systems at 193 nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5567, Issue PART 2, 2004, Pages 887-893

  Brunner, Robert ^a   Menck, Alexander ^a   Steiner, Reinhard ^a   Buchda, Gerd ^a   Weissenberg, Steffen ^a   Horn, Uwe ^a   Zibold, Axel ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

Diffractive optics; High resolution microscopy; Hybrid optics; Solid immersion lens

Indexed keywords

DIFFRACTIVE OPTICS; LENSES; LIGHT SOURCES; MASKS; MICROSCOPIC EXAMINATION; PHASE SHIFT;

HIGH RESOLUTION MICROSCOPY; HYBRID-OPTICS; PHASE SHIFT MASKS (PSM); SOLID IMMERSION LENS;

OPTICAL SYSTEMS;

EID: 19844363510     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.569019     Document Type: Conference Paper

References (5)

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5. G. S. Kino, Fields associated with the solid immersion lens, Proc. SPIE Vol. 3467 (1998) 128-137