Fields associated with the solid immersion lens

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3467, Issue , 1998, Pages 128-137

  Kino, G S ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

Focus; Lithography; Microscope; Near field; Optical storage; Solid immersion lens

Indexed keywords

FOCUSING; IMAGING SYSTEMS; NEAR FIELD SCANNING OPTICAL MICROSCOPY; OPTICAL IMAGE STORAGE; OPTICAL MULTILAYERS; PHOTOLITHOGRAPHY; REFRACTIVE INDEX;

NEAR-FIELD; SOLID IMMERSION LENS;

LENSES;

EID: 0000251833     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.326811     Document Type: Conference Paper

References (12)

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