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Volumn 212-213, Issue SPEC., 2003, Pages 319-324
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STM investigation of epitaxial Si growth for the fabrication of a Si-based quantum computer
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Author keywords
Molecular beam epitaxy; Quantum computer; Scanning tunnelling microscopy; Silicon
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Indexed keywords
ANNEALING;
DIMERS;
EPITAXIAL GROWTH;
HYDROGEN;
HYDROGENATION;
MOLECULAR BEAM EPITAXY;
MONOLAYERS;
PHOSPHORUS;
QUANTUM THEORY;
SCANNING TUNNELING MICROSCOPY;
THERMAL EFFECTS;
QUANTUM COMPUTERS;
SEMICONDUCTING SILICON;
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EID: 0038241594
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(03)00370-2 Document Type: Conference Paper |
Times cited : (17)
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References (16)
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