Structural and dielectric properties of ZnO-doped (Zr0.8Sn 0.2)TiO4 films at radio frequency

Integrated Ferroelectrics

Volumn 51, Issue , 2003, Pages 127-136

  Hsu, Cheng Shing ^a   Huang, Cheng Liang ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

rf magnetron sputtering; rf measurement; Thin film; ZST

Indexed keywords

ATOMIC FORCE MICROSCOPY; DOPING (ADDITIVES); MAGNETRON SPUTTERING; PERMITTIVITY; X RAY DIFFRACTION; ZINC OXIDE; ZIRCONIUM COMPOUNDS;

BLUETOOTHS; CHIP CAPACITORS;

THIN FILMS;

EID: 19744367482     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580390238211     Document Type: Article

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